著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Chen, Fusen E. and Murarka, S. P. and Society of Photo-optical Instrumentation Engineers","Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas",,SPIE,1994,Proceedings,,0819416681,,https://cir.nii.ac.jp/crid/1130000794121053440