著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Kwok, Thomas and Kikkawa, Takamaro and Shenai, Krishna and Society of Photo-optical Instrumentation Engineers","Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California",,SPIE,1993,Proceedings,,0819410039,,https://cir.nii.ac.jp/crid/1130000794133828352