著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
Symposium on Microlithography and Bacus International and Society of Photo-optical Instrumentation Engineers,"10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California",,SPIE,1991,Proceedings,,0819406058,,https://cir.nii.ac.jp/crid/1130000794170310656