著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Plasma Etching and Deposition (1980 : Hollywood, Fla.) and Frieser, R. G. and Mogab, C. J. and Electrochemical Society. Dielectrics and Insulation Division and Electrochemical Society. Electronics Division",Plasma processing : proceedings of the Symposium on Plasma Etching and Deposition,,Electrochemical Society,1981,Proceedings,,,,https://cir.nii.ac.jp/crid/1130000794222815744