著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Singh, Bhanwar and Society of Photo-optical Instrumentation Engineers","Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California",,SPIE,2000,Proceedings,,081943616X,,https://cir.nii.ac.jp/crid/1130000794245283968