著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Claeys, Cor L. and Simoen, Eddy R.","Metal impurities in silicon- and germanium-based technologies : origin, characterization, control, and device impact",,Springer,2018,Springer series in materials science,,9783319939247,,https://cir.nii.ac.jp/crid/1130000794303041408