著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Oliver, M. R. (Michael R.)",Chemical-mechanical planarization of semiconductor materials,,Springer,2004,Springer series in materials science,,3540431810,,https://cir.nii.ac.jp/crid/1130000794310533888