著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Bennett, Marylyn Hoy and Society of Photo-optical Instrumentation Engineers and SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control","Integrated circuit metrology, inspection, and process control VIII : 28 February-2 March [1994], San Jose, California",,SPIE,1994,Proceedings,,0819414913,,https://cir.nii.ac.jp/crid/1130000794313370752