著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Yanof, Arnold W. and Society of Photo-optical Instrumentation Engineers","Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VII : 2-4 March 1988, Santa Clara, California",,The Society,1988,Proceedings,,089252958X,,https://cir.nii.ac.jp/crid/1130000794416409600