著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Chau, Kevin and Roop, Ray M. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and National Institute of Standards and Technology (U.S.)","Micromachined devices and components II : 14-15 October 1996, Austin, Texas",,SPIE,1996,Proceedings,,0819422800,,https://cir.nii.ac.jp/crid/1130000794430314496