著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing and Kolbesen, Bernd O. and European Solid State Device Research Conference","Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France",,Electrochemical Society,2005,Proceedings,,1566774284,,https://cir.nii.ac.jp/crid/1130000794453724800