著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Dey, Jim and Society of Photo-optical Instrumentation Engineers and Northern California Microphotomask/Masking Working Group and International Society for Hybrid Microelectronics",Semiconductor microlithography V,,S.P.I.E.-- Society of Photo-optical Instrumentation Engineers,1980,Proceedings of the Society of Photo-Optical Instrumentation Engineers,,089252250X,,https://cir.nii.ac.jp/crid/1130000794473203328