著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Cleaning Technology in Semiconductor Device Manufacturing and Rużyłło, Jerzy and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division",Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium,,Electrochemical Society,2004,Proceedings,,156677411X,,https://cir.nii.ac.jp/crid/1130000794482331648