著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"小沼, 光晴",Film deposition by plasma techniques,,Springer-Verlag,1992,Springer series on atoms + plasmas,,"3540540571,0387540571",,https://cir.nii.ac.jp/crid/1130000794508741760