著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Advanced Mcrolithography Technologies and Wang, Yangyuan and Yao, Jun'en and Progler, Christopher J. and Society of Photo-optical Instrumentation Engineers and Chinese Optical Society and Australian Optical Society and National Natural Science Foundation of China","Advanced microlithography technologies : 8-10 November, 2004, Beijing, China",,SPIE,2005,Proceedings,,0819456004,,https://cir.nii.ac.jp/crid/1130000794508960256