著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Monahan, Kevin M. and Society of Photo-optical Instrumentation Engineers","Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California",,SPIE Optical Engineering Press,1994,Critical reviews of optical science and technology,,0819413631,,https://cir.nii.ac.jp/crid/1130000794593550848