著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Brunner, Timothy A. and Society of Photo-optical Instrumentation Engineers","Optical/laser microlithography VII : 2-4 March 1994, San Jose, California",,SPIE,1994,Proceedings,,0819414921,,https://cir.nii.ac.jp/crid/1130000794621820544