著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Design and Process Integration for Microelectronic Manufacturing (Conference) and Liebmann, Lars W. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and International SEMATECH","Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA",,SPIE,2004,Proceedings,,0819452920,,https://cir.nii.ac.jp/crid/1130000794661061760