著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Yanof, Arnold W. and Society of Photo-optical Instrumentation Engineers and SPIE Symposium on Microlithography","Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VIII : 1-3 March 1989, San Jose, California",,SPIE,1989,Proceedings,,0819401242,,https://cir.nii.ac.jp/crid/1130000794705729024