著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Inorganic Resist Systems and Doane, Daryl Ann and Heller, Adam and Electrochemical Society. Dielectrics and Insulation Division and Electrochemical Society. Electronics Division and Electrochemical Society. New Technology Subcommittee",Proceedings of the Symposium on Inorganic Resist Systems,,Electrochemical Society,1982,Proceedings,,,,https://cir.nii.ac.jp/crid/1130000794710008704