著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Device and Process Technologies for MEMS, Microelectronics, and Photonics (Conference) and Chiao, Jung-Chih and Society of Photo-optical Instrumentation Engineers and University of Western Australia and Defence Science and Technology Organisation (Australia)","Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia",,SPIE,2004,Proceedings,,081945169X,,https://cir.nii.ac.jp/crid/1130000794803483648