著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Al-Jumaily, Ghanim A. and Duparré, Angela and Singh, Bhanwar and Society of Photo-optical Instrumentation Engineers","Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA",,SPIE--the International Society for Optical Engineering,2000,Proceedings,,0819437441,,https://cir.nii.ac.jp/crid/1130000794828218496