著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Process Physics and Modeling in Semiconductor Technology and Srinivasan, G. R. and Plummer, J. and Pantelides, S. T. and Electrochemical Society. Dielectrics and Insulation Division",Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology,,Electrochemical Society,1990,Proceedings,,,,https://cir.nii.ac.jp/crid/1130000794853858304