著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Design, Process Integration, and Characterization for Microelectronics (Conference) and Starikov, Alexander and Tobin, Kenneth W. and Society of Photo-optical Instrumentation Engineers","Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA",,SPIE,2002,Proceedings,,0819444391,,https://cir.nii.ac.jp/crid/1130000794985876480