著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Schmidt, Dennis N. and Electrochemical Society. Electronics Division",Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III,,The Electrochemical Society,1994,Proceedings,,1566770416,,https://cir.nii.ac.jp/crid/1130000795014103936