著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Monahan, Kevin M. and Society of Photo-optical Instrumentation Engineers","Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California",,UMI,1989,Proceedings,,0819401226,,https://cir.nii.ac.jp/crid/1130000795034788352