著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Gupta, D. C. (Dinesh C.) and ASTM Committee F-1 on Electronics and United States. National Bureau of Standards and Stanford University and Symposium on Silicon Processing",Silicon processing : a symposium,,ASTM,1983,ASTM special technical publication,,,,https://cir.nii.ac.jp/crid/1130000795037748352