著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Claeys, Cor L. and Electrochemical Society. Meeting and International Symposium on ULSI Process Integration",ULSI process integration : proceedings of the first international symposium,,Electrochemical Society,1999,Proceedings,,1566772419,,https://cir.nii.ac.jp/crid/1130000795067150720