著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Thin Film Materials, Processes, Reliability, and Applications: Thin Film Processes and Mathad, G. S. and Meyyappan, M. and Engelhardt, M. (Michael) and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division and Electrochemical Society. Electrodeposition Division and Electrochemical Society. Meeting and International Society of Electrochemistry. Meeting","Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes",,Electrochemical Society,1998,Proceedings,,1566771838,,https://cir.nii.ac.jp/crid/1130000795077845632