著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Marsden, Charles P.","Silicon device processing : proceedings of a symposium held at Gaithersburg, Maryland June 2-3, 1970",,U.S. G.P.O.,1970,NBS special publication,,,,https://cir.nii.ac.jp/crid/1130000795106378880