著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"難波, 進 and 北山, 豊樹 and 応用物理学会 and American Vacuum Society and IEEE Electron Devices Society","MicroProcess 90 : proceedings of the 1990 International Symposium on MicroProcess Conference, July 16-19, 1990, Chiba, Japan",,"Publication Office, Japanese Journal of Applied Physics",1991,JJAP series,,4900526045,,https://cir.nii.ac.jp/crid/1130000795108784768