著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "International Mechanical Engineering Congress and Exposition and American Society of Mechanical Engineers. Microelectromechanical Systems Subdivision and Lee, Abraham P.","Micro-electro-mechanical systems (MEMS) 2001 : presented at 2000[2001] International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York",,American Society of Mechanical Engineers,2001,MEMS,,0791835553,,https://cir.nii.ac.jp/crid/1130000795109767680