著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Graff, Klaus",Metal impurities in silicon-device fabrication,"2nd, revised ed.",Springer-Verlag,2000,Springer series in materials science,,3540642137,,https://cir.nii.ac.jp/crid/1130000795142190336