著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Cuthbert, John D. and Society of Photo-optical Instrumentation Engineers","Optical/laser microlithography V : 11-13 March 1992, San Jose, California",,SPIE,1992,Proceedings,,0819408298,,https://cir.nii.ac.jp/crid/1130000795145992064