著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing and Meyyappan, M. and Economou, D. J. and Butler, S. W. (Stephanie Watts)","Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing",,Electrochemical Society,1995,Proceedings,,1566770963,,https://cir.nii.ac.jp/crid/1130000795148168320