著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"O'Mara, William C. and Herring, Robert B. and Hunt, Lee P. (Lee Philip)",Handbook of semiconductor silicon technology,,Noyes Publications,1990,Materials science and process technology series,,0815512376,,https://cir.nii.ac.jp/crid/1130000795161029504