著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Design and Process Integration for Microelectronic Manufacturing (Conference) and Starikov, Alexander and Society of Photo-optical Instrumentation Engineers","Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA",,SPIE,2003,Proceedings,,0819448478,,https://cir.nii.ac.jp/crid/1130000795207037952