著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on ULSI Process Integration and Claeys, Cor L. and Electrochemical Society. Meeting and Electrochemical Society. Electronics Division and IEEE Electron Devices Society",ULSI Process Integration : proceedings of the International Symposium,,Electrochemical Society,2001,Proceedings,,"1566773083,1566773768,1566774640",,https://cir.nii.ac.jp/crid/1130000795263484032