著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Funk, Jörg",Modelling and simulation of IMEMS : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Technical Sciences,,Swiss Federal Institute of Technology Zurich,1995,Diss. ETH,,3907574133,,https://cir.nii.ac.jp/crid/1130000795315521664