著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Sherman, Arthur","Chemical vapor deposition for microelectronics : principles, technology, and applications",,Noyes Publications,1987,Materials science and process technology series,,0815511361,,https://cir.nii.ac.jp/crid/1130000795316438656