著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Gallois, Bernard M. and Lee, Woo Y. and Pickering, Michael A. and Materials Research Society","Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.",,Materials Research Society,1995,Materials Research Society symposium proceedings,,1558992642,,https://cir.nii.ac.jp/crid/1130000795321662080