著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Behringer, Uwe F. W. and Uttamchandani, Deepak and Society of Photo-optical Instrumentation Engineers and Scottish Enterprise and European Optical Society and Institution of Electrical Engineers","MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK",,SPIE,2001,Proceedings,,0819441082,,https://cir.nii.ac.jp/crid/1130000795336860928