著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Cleaning Technology in Semiconductor Device Manufacturing and Rużyłło, Jerzy and Electrochemical Society. Electronics Division and Electrochemical Society. Meeting",Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing,,Electrochemical Society,1998,Proceedings,,1566771889,,https://cir.nii.ac.jp/crid/1130000795337232512