著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Cahn, R. W. (Robert W.) and Haasen, P. (Peter) and Kramer, E. J. (Edward J.) and Jackson, Kenneth A.",Processing of semiconductors,,VCH,1996,Materials science and technology : a comprehensive treatment,,3527268294,,https://cir.nii.ac.jp/crid/1130000795347980928