著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Stover, Harry L. and Society of Photo-optical Instrumentation Engineers","Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California",,SPIE--the International Society for Optical Engineering,1982,Proceedings,,0892523697,,https://cir.nii.ac.jp/crid/1130000795359681664