著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Tadigadapa, Srinivas A. and Ghodssi, Reza and Henning, Albert K.","MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA",,SPIE,2007,Proceedings,,9780819465771,,https://cir.nii.ac.jp/crid/1130000795372811520