著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Devaney, John R. and Leedy, K. O. and Keery, W. J.",Notes on SEM examination of microelectronic devices,,U.S. G.P.O.,1977,NBS special publication,,,,https://cir.nii.ac.jp/crid/1130000795463694592