著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Schuegraf, Klaus K.","Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications",2nd ed,Noyes,2002,Materials science and process technology series,,0815514425,,https://cir.nii.ac.jp/crid/1130000795490758912