著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Cowern, Nicholas E. B.","Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.",,Materials Research Society,1998,Materials Research Society symposium proceedings,,1558994386,,https://cir.nii.ac.jp/crid/1130000795497172224