著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Theil, Jeremy A.","Materials, integration and tecnology for monolithic instruments : symposium held March 29-30, 2005, San Francisco, California, U.S.A.",,Materials Research Society,2005,Materials Research Society symposium proceedings,,1558998233,,https://cir.nii.ac.jp/crid/1130000795528417664